%PDF-1.6 % 303 0 obj <> endobj xref 303 52 0000000016 00000 n 0000001718 00000 n 0000002028 00000 n 0000002179 00000 n 0000002636 00000 n 0000002678 00000 n 0000002803 00000 n 0000003533 00000 n 0000003891 00000 n 0000003980 00000 n 0000005172 00000 n 0000006302 00000 n 0000006821 00000 n 0000006915 00000 n 0000008107 00000 n 0000008560 00000 n 0000009078 00000 n 0000009505 00000 n 0000009541 00000 n 0000009569 00000 n 0000009616 00000 n 0000009663 00000 n 0000009862 00000 n 0000010067 00000 n 0000010269 00000 n 0000010334 00000 n 0000012199 00000 n 0000013954 00000 n 0000015785 00000 n 0000015881 00000 n 0000016222 00000 n 0000016354 00000 n 0000018252 00000 n 0000018643 00000 n 0000018856 00000 n 0000020755 00000 n 0000020921 00000 n 0000022671 00000 n 0000024675 00000 n 0000026567 00000 n 0000029237 00000 n 0000062197 00000 n 0000089015 00000 n 0000101408 00000 n 0000121220 00000 n 0000121282 00000 n 0000122135 00000 n 0000130730 00000 n 0000131583 00000 n 0000159167 00000 n 0000159194 00000 n 0000001336 00000 n trailer <<6F30CED09901B04781FCD0751836560F>]>> startxref 0 %%EOF 354 0 obj<>stream xb```a``c`c`xAX,[ց+Ugw23 ϫM|䋰ۥ]yei36q FPj2n )2bS4 C :~$v,,oYzW1f k61gPcc;hŐϘð=m7NvO |=+BB(HI H3nf J :r,Ʒ c`3@ IC endstream endobj 304 0 obj<>/PageMode/UseNone/Outlines 17 0 R/Metadata 301 0 R/AcroForm 305 0 R/PieceInfo<>>>/Pages 300 0 R/OpenAction[306 0 R/XYZ null null null]/StructTreeRoot 27 0 R/Type/Catalog/LastModified(D:20030310122254)>> endobj 305 0 obj<>/Encoding<>>>>> endobj 306 0 obj<>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]/ExtGState<>>>/Type/Page>> endobj 307 0 obj[308 0 R 309 0 R 313 0 R] endobj 308 0 obj<> endobj 309 0 obj<
2E67.P
)/RD[0.000152588 0.000152588 0.000152588 0.000152588]/Type/Annot/AP<>>> endobj 310 0 obj<>/ProcSet[/PDF/Text]>>/Type/XObject/BBox[543.074 752.847 586.283 764.857]/FormType 1>>stream HK ADuZ&;=*Wx 8 s}s)+^)'tDݜU47&ڳT'(ܧ15- j2?<]̌qƢkq8+ g endstream endobj 311 0 obj<> endobj 312 0 obj<> endobj 313 0 obj<12, 667-669 \(2004\))/M(D:20090915154425-07'00')/IT/FreeTextTypewriter/P 306 0 R/T(stroian)/DA(0 G 0 0 0 rg 0 Tc 0 Tw 100 Tz 11 TL 0 Ts 0 Tr /CoBo 9 Tf)/DS(font: bold Courier,monospace 9.0pt; text-align:left; color:#000000 )/Subj(Text Box)/RC(Tech. Digest 12th Internat'l Conf. on Solid State Sensors, Actuators
and Microsystems <b>12</b>, 667-669 \(2004\)\
)/RD[0.000152588 0.000152588 0.000152588 0.000152588]/Type/Annot/AP<>>> endobj 314 0 obj<>/ProcSet[/PDF/Text]>>/Type/XObject/BBox[18.0714 751.855 396.076 772.0]/FormType 1>>stream HAk ~w #.m3ZeT~>`ABJ -@T ,(:C, ,7^C.$OdlJHszCni@<\4Їvgz,@sГ9D!J+gl&Irvs7&]O*}?k$D9pڦ{8RBmӹSWz|>[/&W^)JYY2ycEij}|0 [ur endstream endobj 315 0 obj<> endobj 316 0 obj<> endobj 317 0 obj<> endobj 318 0 obj<> endobj 319 0 obj<> endobj 320 0 obj[/ICCBased 342 0 R] endobj 321 0 obj/DeviceGray endobj 322 0 obj[/Indexed 320 0 R 255 348 0 R] endobj 323 0 obj[/Indexed 320 0 R 255 350 0 R] endobj 324 0 obj<> endobj 325 0 obj<> endobj 326 0 obj<> endobj 327 0 obj<> endobj 328 0 obj<>stream HW[OG~`3qZpYEkH3k03px9wN{}&؇'\?^#`K6ڛ5ft_^57rhﷹdjWUG!lY~'yIx5}:;